Articles

Unsupervised Prognostics and Health Management for Semiconductor Manufacturing Air Compressors: An LSTM Autoencoder Framework with Seasonal Decomposition and Real-Time Anomaly Detection

KuoHao Chang, Tung-Chin Hsieh, Chung-Ming Kuo*, Hsiu-Ping Lin (Author)
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DOI: https://doi.org/10.63646/jiic.2021.010301