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Issue 3 (2021)
Issue 3 (2021)
1 Items
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Unsupervised Prognostics and Health Management for Semiconductor Manufacturing Air Compressors: An LSTM Autoencoder Framework with Seasonal Decomposition and Real-Time Anomaly Detection
KuoHao Chang, Tung-Chin Hsieh, Chung-Ming Kuo*, Hsiu-Ping Lin (Author)
Open Access PDF
1-13
DOI:
https://doi.org/10.63646/jiic.2021.010301
